Dependence of ion-induced Pd-siliclde formation on nuclear energy deposition density

Author:

Horino Yuji,Matsunami Noriaki,Itoh Noriaki

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. High Energy Ion Bombardment of Thin Films: From Platinum on Silicon to Platinum Silicide;Journal of The Electrochemical Society;2014

2. Model for compound formation during ion-beam mixing;Physical Review B;1993-11-01

3. An ion beam mixing model for compound formation: the case of Pd/Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-06

4. An overview of the ion beam mixing rates in Pd/Si bilayers versus the temperature and deposited energy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-11

5. Comparison of the kinetics in ion beam mixed Pd/Si adn Pd/Al;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-07

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