Lattice site location of clustered boron atoms in silicon-Reference-Cited by-同舟云学术

Lattice site location of clustered boron atoms in silicon

Published:1990-01 Issue:1-4 Volume:45 Page:438-441
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Smulders P.J.M.,Boerma D.O.,Nielsen B.Bech,Swanson M.L.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference15 articles.

2. Materials Analysis by Ion Channeling;Feldman,1982

4. Defects in Semiconductors;Swanson,1981

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