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The characterization of semiconductor materials by backscattering spectroscopy

  • Published:1985-05 Issue: Volume:10-11 Page:583-587
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Keenan J.A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference13 articles.

1. Backscattering Spectroscopy;Chu,1978

2. Materials and Process Characterization;Nicolet,1983

3. Metallization in microelectronics

4. R. Eklund, private communication.

5. VLSI Materials: A Comparison between Buried Oxide SOI and SOS

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