Mass and energy dependence of the sputtering yield of gallium arsenide
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference18 articles.
1. Sputtering by Particle Bombardment I;Andersen,1981
2. Energy dependence of the ion-induced sputtering yields of monatomic solids
3. Sputtering of GaAs single crystals by 8–16 keV argon ions
4. The sputtering of gallium arsenide at elevated temperatures
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