The MEVVA ion source for high current metal ion implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference14 articles.
1. High current ion source
2. The Metal Vapor Vacuum ARC (MEVVA) High Current Ion Source
3. Metal vapor vacuum arc ion source
4. High energy heavy ions: techniques and applications
5. Vacuum Arcs — Theory and Application,1980
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