Author:
Turner Norman,Purser Kenneth H.,Sieradzki Manny
Subject
Instrumentation,Nuclear and High Energy Physics
Reference13 articles.
1. Solid State Technology;Pramanik,1984
2. Proc. 5th Ion Implantation Conf. Equip. and Tech.;Ziegler,1985
3. A twin-well CMOS process employing high-energy ion implantation
4. Proc. 5th Int. Conf. on Ion Implantation Equip. and Tech.;Spinelli,1985
Cited by
12 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Ion Beam Technology;Ion Beams in Materials Processing and Analysis;2012
2. A cw 4-rod RFQ linac;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1994-06
3. Cross sections for l-selective electron capture into the He+(n=4) shell in intermediate energy collisions of He2+with H and H2;Journal of Physics B: Atomic, Molecular and Optical Physics;1992-03-28
4. Range parameters and annealing behaviour of 250–1500 keV high energy boron and phosphorus implantations into silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-01
5. The beam performance of the Genus G-1500 ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04