Atomic mixing of silver into a silicon substrate using a 45 keV beam of Ar+ ions

Author:

Jimenez-Rodriguez J.J.,Tognetti N.P.,Marsh T.,Collins R.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference21 articles.

1. Proc. 2nd Int. Conf. on Ion beam modification of materials,1981

2. Proc. 9th Int. Conf. on Atomic collisions in solids,1982

3. Proc. 3rd Int. Conf. on Ion beam modification of materials,1983

4. A theoretical treatment of cascade mixing in depth profiling by sputtering

5. Recoil mixing in solids by energetic ion beams

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