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A high brightness plasma sputter heavy negative ion source

  • Published:1989-04 Issue: Volume:40-41 Page:1008-1013
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Alton G.D.,Mori Y.,Takagi A.,Ueno A.,Fukumoto S.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface Plasma Negative Ion Sources;Springer Series on Atomic, Optical, and Plasma Physics;2023

2. Antibacterial Effect of Au Implantation in Ductile Nanocomposite Multilayer (TiAlSiY)N/CrN Coatings;ACS Applied Materials & Interfaces;2019-10-24

3. Development and Applications of Negative Ion Sources;Springer Series on Atomic, Optical, and Plasma Physics;2019

4. Surface Plasma Negative Ion Sources;Springer Series on Atomic, Optical, and Plasma Physics;2019

5. Negative Ion Plasmas;Encyclopedia of Plasma Technology;2016-12-12
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