The effect of chromium implantation on the hardness, elastic modulus, and residual stress of Al2O3
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference14 articles.
1. Characterizing the hardness and modulus of thin films using a mechanical properties microprobe
2. Hardness measurement at penetration depths as small as 20 nm
3. A method for interpreting the data from depth-sensing indentation instruments
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