Alloy sputtering at high fluence: preferential sputtering and competing effects
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference32 articles.
1. Sputtering by Particle Bombardment II;Betz,1983
2. The penetration of positive ions of low energy into alloys and composition changes produced in them by sputtering
3. Ion sputtering of alloys
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