Effect of N2+ ion dose on the hardness and other properties of AIN thin films prepared by the dynamic mixing method
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference8 articles.
1. Modification of niobium film stress by low‐energy ion bombardment during deposition
2. Adherent TiN films produced by ion beam enhanced deposition at room temperature
3. Summary Abstract: Properties of TiN thin films on several substrate plates with a high current ion mixing machine
4. Titanium Nitride Crystal Growth with Preferred Orientation by Dynamic Mixing Method
5. Proc. Int. Ion Engineering Congress -ISIAT'83 and IPAT'83;Matthews,1983
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