New computer control system for the high current ion implanter PR-80
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Published:1989-02
Issue:
Volume:37-38
Page:548-551
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ISSN:0168-583X
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Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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language:en
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Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Author:
Sunouchi T.,Sasaki M.,Sato S.,Harada M.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference1 articles.
1. Proc. 6th Int. Conf. on Ion Implantation Technology;Kawai,1987
Cited by
1 articles.
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1. Control system for a 300 kV ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-05