Author:
Ding P.J.,Wang W.,Lanford W.A.,Hymes S.,Murarka S.P.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference21 articles.
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2. Metallization Theory and Practice for VLSI and ULSI;Murarka,1992
3. Oxidation kinetics of copper: An experiment in solid state chemistry
4. Pressure dependencies of copper oxidation for low- and high-temperature parabolic laws
5. MRS Spring Meeting;Ding,1993
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