Kinetic energy distributions of sputtered indium atoms and clusters
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference31 articles.
1. Fundamental Processes in Sputtering of Atoms and Molecules (SPUT92);Urbassek,1993
2. Formation of secondary cluster ions during sputtering of silver and copper
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5. Sputtered neutral silver clusters up to Ag18
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