Analysis of carbon film growth from low energy ion beams using dynamic trajectory simulations and Auger electron spectroscopy
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference27 articles.
1. Ion Bombardment Modification of Surfaces: Fundamentals and Applications;Harper,1987
2. The role of ion/surface interactions and photo-induced reactions during film growth from the vapor phase
3. Ion beam deposition in materials research
4. Ion beam bombardment effects during films deposition
5. Deposition and Growth: Limits for Microelectronics, Anaheim, CA, 1987;Herbots,1988
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