Ion beam modification for submicron technology
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference27 articles.
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1. Advantages of the use of supertip Xe+ sources with field gas ionization in ion microscopes;Russian Microelectronics;2011-01
2. Design criteria of neuron/electrode interface. The focused ion beam technology as an analytical method to investigate the effect of electrode surface morphology on neurocompatibility;Biomedical Microdevices;2007-01-18
3. Characterization of atomic-size metal ion sources;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001
4. Realization of an axially aligned Au-ion source of atomic size;Applied Physics Letters;1999-08-30
5. Multipurpose nanobeam source with supertip emitter;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-07
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