New microwave ion source for high energy ion implanter-Reference-Cited by-同舟云学术

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New microwave ion source for high energy ion implanter

Published:1989-02 Issue: Volume:37-38 Page:87-89
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Amemiya K.,Tokiguchi K.,Koike H.,Seki T.,Sakudo N.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference11 articles.

1. High energy ion implantation

2. Proc. 11th Symp. on ISIAT'87;Buckley-Golder,1987

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1. Atmospheric Pressure Microwave Argon Plasma Sheet for Wettability Modification of Polyethylene Surfaces;IEEE Transactions on Plasma Science;2019-02

2. Development of an all-permanent-magnet microwave ion source equipped with multicusp magnetic fields for high current proton beam production;Review of Scientific Instruments;2008

3. Development of an electrostatic beam focus lens equipped with electron suppression grids for a microwave ion source to inject high-current ion beams into a linac;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2005-09

4. Development of a high-current microwave ion source for proton linac application systems;Review of Scientific Instruments;2004-05

5. High energy aluminum ion implantation using a variable energy radio frequency quadrupole implanter;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-03

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