Theoretical calculation of the depth resolution of IBA methods-Reference-Cited by-同舟云学术

Theoretical calculation of the depth resolution of IBA methods

Published:1994-03 Issue:1-4 Volume:85 Page:616-620
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Szilágyi E.,Pászti F.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference16 articles.

1. Analysis for hydrogen by nuclear reaction and energy recoil detection

2. Improved depth resolution of channeling measurements in Rutherford backscattering by a detector tilt

3. Characterization of ion implanted silicon by ellipsometry and channeling

4. Analysis and depth profiling of deuterium with the D(3He, p)4He reaction by detecting the protons at backward angles

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