Author:
Licciardello Antonino,Puglisi Orazio,Calcagno Lucia,Foti Gaetano
Subject
Instrumentation,Nuclear and High Energy Physics
Reference19 articles.
1. Ion‐chain interaction in keV ion‐beam‐irradiated polystyrene
2. Ion Beam Modification of Insulators;Venkatesan,1987
3. Ion bombardment of resists
4. Introduction to Microlithography;Willson,1983
5. Ion Beam Modification of Insulators;Venkatesan,1987
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