Channeling contrast analysis of GaAs side-walls fabricated by laser wet chemical etching-Reference-Cited by-同舟云学术

Channeling contrast analysis of GaAs side-walls fabricated by laser wet chemical etching

Published:1994-03 Issue:1-4 Volume:85 Page:752-755
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Takai M.,Hara S.,Lee C.,Kinomura A.,Lohner T.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference11 articles.

1. Ion Implantation;Ryssel,1986

2. Laser Microfabrication;Ehrlich,1989

3. Focused Ion Beams from Liquid Metal Ion Sources;Prewett,1991

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