Modification of ZnO crystal orientation in dual ion beam sputtering deposition
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference10 articles.
1. Influence of Bombardment by Energetic Atoms onc-Axis Orientation of ZnO Films
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3. Preparation of CoCr thin films on polymer substrates by ion beam sputtering
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1. Effects of Additional Oxygen Flow on the Optical and Electrical Properties of Ion Beam Sputtering Deposited Molybdenum-Doped Zinc Oxide Layer;Journal of Nanomaterials;2012
2. Influence of assistant ion beam on the opto-electrical properties of molybdenum doped zinc oxide films deposited on polyethersulfone via dual ion beam sputtering;Vacuum;2011-03
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4. Pt thin films prepared by low energy plasma sputtering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-01
5. Ion implantation in PbTiO3films;Journal of Applied Physics;1992-10-15
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