Status report on the camd project-Reference-Cited by-同舟云学术

Status report on the camd project

Published:1989-04 Issue: Volume:40-41 Page:379-383
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Craft B.C.,Findley A.M.,Findley G.L.,Scott J.D.,Watson F.H.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference9 articles.

2. Proc. Workshop on Compact Storage Ring Technology: Applications to Lithography,1986

3. Report of the Second Workshop on Synchrotron Radiation Sources for X-Ray Lithography,1986

4. Report of the Third Workshop: Program for X-ray Lithography Development,1986

5. Design of a National Dedicated Synchrotron Radiation Facility;Chasman,1976

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. X-ray exposure system for induced chemistry and dry processes in microlithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11

2. Synchrotron Radiation Sources for Materials Technology;Application of Particle and Laser Beams in Materials Technology;1995

3. Commissioning the LSU synchrotron light source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-06

4. The LSU electron storage ring;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-05

5. Utilization of a commercially supplied synchrotron radiation source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-05