Sputtering of insulators
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference64 articles.
1. Phase changes in insulators produced by particle bombardment
2. Ion Bombardment Modification of Surfaces;Kelly,1984
3. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
4. Electron and photon sputtering of alkali halides
5. Sputtering by Particle Bombardment II;Townsend,1983
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