A percolation approach to ion beam induced modifications of organic resists-Reference-Cited by-同舟云学术

A percolation approach to ion beam induced modifications of organic resists

Published:1985-03 Issue: Volume:7-8 Page:513-516
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Davenas J.,Xu X.L.,Khodr C.,Treilleux M.,Steffan G.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

1. Proc. 4th Int. Conf. on Ion Implantation and Equipment Techniques;Smith,1982

4. Proc. MRS Europ. Conf.;Davenas,1984

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