A multipurpose implanter with various target chambers for basic studies on the influence of ion bombardment on material properties-Reference-Cited by-同舟云学术

A multipurpose implanter with various target chambers for basic studies on the influence of ion bombardment on material properties

Published:1992-05 Issue:1-4 Volume:68 Page:402-407
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Frech G.,Ensinger W.,Müller H.,Hans M.,Wolf G.K.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference12 articles.

1. Proc. Int. Conf. on Ion Beam Modification of Materials,1991

5. Plasma Surface Engineering;Ensinger,1989

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of a versatile, high-temperature, high-throughput ion irradiation system;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2021-12

3. Platinum implantation into tantalum for protection against hydrogen embrittlement during corrosion;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-02