Clean room technology: the concept of total environmental control for advanced industries-Reference-Cited by-同舟云学术

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Clean room technology: the concept of total environmental control for advanced industries

Published:1985-10 Issue:10-11 Volume:35 Page:485-491
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Schicht HH

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference6 articles.

1. U.S. Federal Standard 209b, Clean room and work station requirements, controlled environment,1973

2. DIN 24 184: Type Testing of HEPA Filters,1974

3. Proceedings of the 6th International Symposium on Contamination Control;Schicht,1982

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