Simulation of ion beam assisted deposition—a comparison with experimental results

Author:

Ektessabi AM,Sato S,Kitamura H,Masaki Y

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference16 articles.

1. Si Molecular Beam Epitaxy (n on n+) with Wide Range Doping Control

2. Proceedings of the International Conference on Evolution in Beam Applications;Ektessabi,1991

3. Proceedings of the 2nd Workshop on Beam Engineering of Advanced Material;Ektessabi,1991

4. Effect of nitrogen ion bombardment on copper-gold interface

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