Tungsten contamination of vacuum-deposited permalloy films

Author:

D Miller William

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Oxide Impurities in Silicon Oxide Intermetal Dielectrics and Their Potential to Elevate Via-Resistances;Microscopy and Microanalysis;2014-05-12

2. Study on early stages of film growth for Sn doped In2O3 films deposited at various substrate temperatures;Thin Solid Films;2008-07

3. Thermal outgassing of vacuum glazing;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-05

4. Precise static and dynamic permeation measurements using a continuous-flow vacuum cell;Journal of Membrane Science;1995-10

5. Ultrahigh vacuum in the semiconductor industry;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-07

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