Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by
42 articles.
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1. Fifty years of vacuum science;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2003-09
2. Sputter-ion pumping;Capture Pumping Technology;2001
3. References;Vacuum Technology;1990
4. Internal stress minimization in the fabrication of transmissive multilayer x‐ray optics;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1989-03
5. Sputtertechniken;WFT Werkstoff-Forschung und -Technik;1987