Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference74 articles.
1. Ion Implantation in Semiconductor, Silicon and Germanium;Mayer,1970
2. Ion Implantation;Dearnaley,1973
3. Ion Implantation, Sputtering, and their Applications;Townsend,1976
4. Ion Implantation,1980
5. Model calculation of ion collection in the presence of sputtering
Cited by
55 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献