Novel PVD films by unbalanced magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference25 articles.
1. Charged particle fluxes from planar magnetron sputtering sources
2. Unbalanced dc magnetrons as sources of high ion fluxes
3. Ion beam bombardment effects during films deposition
4. The formation and control of direct current magnetron discharges for the high‐rate reactive processing of thin films
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