Study of outgassing of sputter-ion pump materials treated with three different cleaning procedures
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference6 articles.
1. Desorbed gas flow rate and surface composition of metal alloys
2. Gas adsorption/desorption and materials stability
3. Proc 13th Int IMEKO TC3 Conf;Plassa,1993
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