Primary and transfer standards for vacuum and mass flow in an industrial calibration facility
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference27 articles.
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2. Basics of Vacuum Measurement from viewpoint of Metrology (4) Long-term Stability of Vacuum Gauges;Journal of the Vacuum Society of Japan;2015
3. References;Modern Vacuum Physics;2004-08-30
4. High-accuracy calibration in the vacuum range 0.3 Pa to 4000 Pa using the primary standard of static gas expansion;Metrologia;2002-06
5. Primary pressure standard for calibration in the medium vacuum range;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1997-09
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