Discharge studies in a triode ion plating system
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. Fundamentals of Ion Plating
2. Ion-Plating—A New Promising Vacuum Coating Process;Schiller,1976
3. The formation of low friction wear-resistant surfaces on titanium by ion plating
4. Structure Modification by Ion Bombardment during Deposition
5. Effect of ion bombardment during deposition on thick metal and ceramic deposits
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1. Effect of target power on the physical properties of Ti thin films prepared by DC magnetron sputtering with supported discharge;Materials Science-Poland;2017-02-24
2. The effect of annealing on the structural, optical and electrical properties of Titanium Nitride (TiN) thin films prepared by DC magnetron sputtering with supported discharge;Journal of Materials Science: Materials in Electronics;2016-06-09
3. Estimation of density of charge species in a triode discharge system;Vacuum;1997-10
4. Effects of oblique energetic bombardment on the morphology and microstructure of triode ion plated titanium films;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1996-03
5. Low temperature synthesis of thin films of carbon nitride;Journal of Materials Research;1995-05
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