Focused ion beam machining and deposition for nanofabrication
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference31 articles.
1. Focused ion beams — microfabrication methods and applications;Prewett;Vacuum,1993
2. The application of ion beam assisted deposition of chrome to photomask repair;Robinson,1989
3. A rewiring technique for integrated circuit operation analysis using a silicon oxide film deposited by a focused ion beam;Komano;J Vac Sci Technol,1991
4. Applications of focused ion beam technique to failure analysis of very large scale integrations: a review;Nikawa;J Vac Sci Technol,1991
5. Focused ion beam fabrication techniques for optoelectronics;Harriott,1992
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