The effect of nitrogen content on the structure and mechanical properties of TiN films produced by magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference29 articles.
1. Microhardness of TiNx coatings obtained by reactive cathodic sputtering
2. On picostructural models of physically vapor-deposited films of titanium nitride
3. Evaluation of mechanical properties of TiN films by ultralow load indentation
4. Structure and properties of titanium nitride thin films deposited at low temperatures using direct current magnetron sputtering
5. Structure and properties of TiN coatings
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