The freon flooding technique in SIMS analysis
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference8 articles.
1. Ion Implantation and Beam Processing;Andersen,1984
2. Beam-induced broadening effects in sputter depth profiling
3. Impurity migration during SIMS depth profiling
4. Secondary Ion Mass Spectrometry;Benninghoven,1987
5. Secondary ion emission from metal targets under carbon trifluoride ion (CF3+) and oxygen ion (O2+) bombardment
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