Physical investigations of DC magnetron sputtered indium tin oxide films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
1. Preparation of In2O3 and tin-doped In2O3 films by a novel activated reactive evaporation technique
2. Optical properties of transparent and heat‐reflecting indium tin oxide films: The role of ionized impurity scattering
3. Electrical, optical and chemical properties of indium-tin oxidized films grown by sequential electron beam deposition of indium and tin
4. Lamellar and Grain Boundary Models for the Electrical Properties of Post-Oxidized ITO Films
5. The deposition of transparent conductive oxide thin films onto large sheets of glass, acrylic and polycarbonate
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1. Annealing effect on indium tin oxide thin films by DC magnetron sputtering for alkali vapor cell heating;Modern Physics Letters B;2019-06-06
2. In situ crystallization of highly conducting and transparent ITO thin films deposited by RF magnetron sputtering;Vacuum;2016-10
3. Plasma Technologies in the Synthesis and Treatment of Nanostructured Metal Oxide Semiconductors for Gas Sensing: A Short Review;Nanoscience and Nanotechnology Letters;2013-03-01
4. Optimized Sputtering Parameters for ITO Thin Films of High Conductivity and Transparency;Ceramic Transactions Series;2012-11-07
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