Author:
Yeh JL,Hills GW,Cochran WT,Rana VVS,Garcia AM
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. Electro Chemical Society Extended Abstracts;Chambers,1987
2. High Resolution, Steep Profile, Resist Patterns
3. Int Conf IEEE VLSI Multilevel Interconnect,1986
Cited by
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