In situ pumping with NEG (non-evaporable getters) during vacuum processing

Author:

Sciuccati F,Ferrario B,Gasparini G,Rosai L

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Testing of non-evaporable getter pills for standardization of their pumping performance testing method;Vacuum;2022-03

2. Testing the activation temperature of non-evaporable Ti-Zr-Hf-V getter films by XPS;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2020-07

3. Hermeticity tests;Handbook of Silicon Based MEMS Materials and Technologies;2020

4. Hermeticity Tests;Handbook of Silicon Based MEMS Materials and Technologies;2015

5. Combination of compact nonevaporable getter and small ion pumps for ultrahigh vacuum systems;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2011-01

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