Author:
Barth R,Siewert J,Spangenberg B,Jaekel C,Kurz H,Utz B,Prusseit W,Kinder H,Wolf H
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by
1 articles.
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1. Freestanding microheaters in Si with high aspect ratio microstructures;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002