The optical properties of GeO2, ZnS and Ge films produced by rf sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. Black germanium solar selective absorber surfaces
2. Antireflection coatings for germanium IR optics: a comparison of numerical design methods
3. Thickness dependence of optical gap and void fraction for sputtered amorphous germanium
4. Optical properties of aluminum oxynitrides deposited by laser-assisted CVD
5. Ultraviolet and infrared absorption of fused Germania
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2. Optical constants of germanium and thermally grown germanium dioxide from 0.5 to 6.6eV via a multisample ellipsometry investigation;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
3. Ion beam sputter deposition of Ge films: Influence of process parameters on film properties;Thin Solid Films;2015-08
4. Correlation between optical properties and chemical composition of sputter-deposited germanium oxide (GeOx) films;Optical Materials;2014-05
5. Spectroscopic Ellipsometry for Inline Process Control in the Semiconductor Industry;Ellipsometry at the Nanoscale;2013
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