Island structure of sputter-deposited Ag thin films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference9 articles.
1. Role of incident kinetic energy of adatoms in thin film growth
2. Grain growth in polycrystalline Ag films induced by Ar+-ion bombardment
3. Effect of ion bombardment during deposition on the x‐ray microstructure of thin silver films
4. Summary Abstract: Non‐bulk‐like physical properties of thin films due to ion bombardment during film growth
5. Microstructure of sputtered metal films grown in high‐ and low‐pressure discharges
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