Focused ion beam technology
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference49 articles.
1. A high‐intensity scanning ion probe with submicrometer spot size
2. Integrated circuit repair using focused ion beam milling
3. Practical results of photomask repair using focused ion beam technology
4. Proc 1989 Int Reliability Physics Symp;Nikawa,1989
5. GaAs Growth Using an MBE System Connected with a 100 kV UHV Maskless Ion Implanter
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3. Ion track enabled multiple wire microvia interconnects in printed circuit boards;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2008-04
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