The modification of alloys by low energy ion-assisted deposition
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. Technology and applications of broad‐beam ion sources used in sputtering. Part II. Applications
2. Material Processing with Broad-Beam Ion Sources
3. Modification of the optical and structural properties of dielectric ZrO2films by ion‐assisted deposition
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