Arc sources of metallic plasma for coatings in vacuum and for high speed vacuum pumping
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference3 articles.
1. L P Sablev, US Patent No 3793179 (1971).
2. A A Snaper, US Patent No 3625848 (1971).
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