Stability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films

Author:

Matsuguchi Masanobu,Kuroiwa Takaaki,Miyagishi Tetsuya,Suzuki Sachiko,Ogura Tsutomu,Sakai Yoshiro

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. H. Grange, C. Bieth, H. Boucher, G. Delapierre, A capacitive humidity sensor with very fast response time and very low hysteresis, in: Proceedings of the Second International Meeting of Chemical Sensors, Bordeaux, France, 7–10 July, 1986, pp. 368–371.

2. M.C. Glenn, J.A. Schuetz, An IC compatible polymer humidity sensor, Tech. Digest, Third International Conference on Solid-State Sensors and Actuators (Transducers ‘85), Philadelphia, PA, 7–11 June, 1985, pp. 217–220.

3. T. Takai, T. Sakamoto, H. Shimizu, K. Murakami, T. Yamamoto, A capacitive polymer humidity sensor using silicon substrate, Tech. Digest, Seventh Sensor Symposium, Tokyo, Japan, 1988, pp. 185–188.

4. The long-term reliability of switched capacitor relative humidity sensor system;Jaafar;Sensors Mater.,1991

5. A model for the relative environmental stability of a series of polyimide capacitance humidity sensors;Ralston;Sensors and Actuators, B,1996

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