1. Using fewer wafers to resolve confounding;Barnett,1997
2. Statistics for Experimenters;Box,1978
3. Elimination of TiN peeling during exposure to CVD Tungsten deposition process using designed experiments;Buckner,1997
4. Modeling a uniformity bulls-eye inversion;Buckner,1997
5. A systematic approach to planning for a designed industrial experiment;Coleman;Technometrics,1993