Ion-chromatographic study of interactions in HF–H3PO4–HNO3 semiconductor etchants-Reference-Cited by-同舟云学术

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Ion-chromatographic study of interactions in HF–H3PO4–HNO3 semiconductor etchants

Published:1998-04 Issue:1-2 Volume:804 Page:161-169
ISSN:0021-9673
Container-title:Journal of Chromatography A
language:en
Short-container-title:Journal of Chromatography A

Author:

Vanatta L.E,Coleman D.E

Publisher

Elsevier BV

Subject

Organic Chemistry,General Medicine,Biochemistry,Analytical Chemistry

Reference5 articles.

1. Sematech Official Dictionary, Rev. 3.0, Sematech, Austin, TX, 1991, p. 74.

2. C.A. Jacobson, Encyclopedia of Chemical Reactions, Vol. 5, Chapman and Hall, New York, 1953, p. 340.

3. Design and Analysis of Experiments Using JMP Software, Course Notes, SAS Institute, Cary, NC, 1995, Ch. 5.

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