1. Ion Implantation;Dearnaley,1973
2. Sputtering by Particle Bombardment I: Physical Sputtering of Single Element Solids,1981
3. Deposition Technologies for Films and Coatings;Thornton,1982
4. Deposition Technologies for Films and Coatings;Mattox,1982
5. Technology of ion beam sources used in sputtering